Novel metalens revolutionize typical Vacuum UV optics know-how — ScienceDaily


A analysis group co-led by Metropolis College of Hong Kong (CityU) have efficiently developed a novel Vacuum Extremely-Violet (VUV) meta-lens which might generate and focus the VUV mild, a disruptive know-how for the UV optics market.

VUV is utilized in semiconductor manufacturing, photochemistry and supplies science. The centered VUV mild supply is strongly wanted for nanolithography, materials processing, superior manufacturing, and different industrial areas.

Nevertheless, it has been pricey to work with. VUV with wavelengths between 100 to 200 nanometres (nm), is strongly absorbed by the oxygen in air, and VUV’s software requires a vacuum chamber or different specialised surroundings. Conventionally, very cumbersome and costly programs with particular and uncommon nonlinear crystals are used for producing and focusing of VUV mild.

Limitations and challenges of making use of VUV mild

As well as, nearly nearly all varieties of glass used for typical lenses are unsuitable for the VUV because of their robust absorption on this area. The few VUV-transmittable supplies at the moment used for lenses are comparably fragile, inserting sensible limits on skinny lens fabrication and design.

To handle the above limitations, Professor Tsai Din-ping, Chair Professor of the Division of Electrical Engineering (EE), and Dr Chen Mu-Ku, Analysis Assistant Professor of EE, have designed and fabricated a lot of a 150nm size triangle form zinc oxide nano-antenna to type a VUV metalens.

“Now we have developed a meta-lens with intricate nano-structures on zinc oxide skinny movie. It’s able to focusing VUV mild. This metalens gives a compact methodology for nonlinear VUV era and focusing of the generated mild,” mentioned Professor Tsai, one of many corresponding authors of the paper not too long ago printed within the educational journal Science Advances titled “Vacuum ultraviolet nonlinear metalens.”

The brand new VUV metalens in a forty five micro-meter (┬Ám) diameter can convert UV mild with 394nm wavelength into VUV mild with 197nm wavelength, and focuses the VUV mild on a small spot lower than 2 micro-metre in diameter. Exams at Rice College demonstrated a centered mild spot with an enhanced energy density by 21 occasions.

Expertise breakthrough revolutionises the market of UV optics

“Our VUV meta-lens is compact, light-weight, efficient, and will be mass produced by semiconductor electronics fabrication course of. This novel and disruptive meta-device might revolutionise the traditional VUV optics know-how and its market,” Professor Tsai mentioned.

The meta-lens permits substantial streamlining of VUV system design and facilitating extra superior functions. This work gives a helpful platform for growing low-loss VUV parts and rising the accessibility of the VUV regime.

This analysis is funded by the Space of Excellence Mission (AoE), College Grants Committee/Analysis Grants Council of Hong Kong SAR authorities. Professor Tsai is the Mission Coordinator of the AoE venture “Meta-optics, Meta-acoustics and Meta-devices.”

Co-authors of the paper embody Professor Naomi Halas, Professor Peter Nordlander, Dr Michael Semmlinger, Dr Zhang Ming, Catherine Arndt, Dr Benjamin Cerjan and Dr Yang Jian of Rice College; Dr Tseng Ming-Lun of Taiwan’s Nationwide Yang Ming Chiao Tung College; Dr Huang Tzu-Ting and Dr Chu Cheng-Hung of Academia Sinica in Taiwan; Dr Kuo Hsin-Yu of Nationwide Taiwan College; and Dr Su Vin-Cent of Nationwide United College in Taiwan.

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